Inventor
LEAL-VERDUGO CARLOS
US4 patents
Patents
4 patentsUS12237203B2Feb 25, 2025
System, method, and user interface for edge ring wear compensation
LAM RES CORP2 citations70
US9716022B2Jul 25, 2017
Method of determining thermal stability of a substrate support assembly
LAM RES CORP2 citations70
US11538713B2Dec 27, 2022
System and method for edge ring wear compensation
LAM RES CORP0 citations58
US10437236B2Oct 8, 2019
Method of determining thermal stability of a substrate support assembly
LAM RES CORP0 citations49