Inventor
ISHIZU TAKAAKI
JP3 patents
Patents
3 patentsUS12417906B2Sep 16, 2025
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations58
US12042813B2Jul 23, 2024
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations50
US11524314B2Dec 13, 2022
Substrate processing method and substrate processing device
SCREEN HOLDINGS CO LTD0 citations48