Inventor
KUDO YUJI
JP37 patents
⚠️ This page may combine multiple inventors who share the name “KUDO YUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
29 patentsUS5719704AFeb 17, 1998
Projection exposure apparatus
NIKON CORP111 citations99
US5253110AOct 12, 1993
Illumination optical arrangement
NIKON CORP172 citations99
US4918583AApr 17, 1990
Illuminating optical device
NIKON CORP192 citations99
US6268904B1Jul 31, 2001
Optical exposure apparatus and photo-cleaning method
NIKON CORP146 citations98
US5237367AAug 17, 1993
Illuminating optical system and exposure apparatus utilizing the same
NIKON CORP142 citations98
US6741394B1May 25, 2004
Optical integrator, illumination optical apparatus, exposure apparatus and observation apparatus
NIKON CORP63 citations96
US6392740B1May 21, 2002
Projection exposure apparatus
NIKON CORP55 citations96
US6377336B1Apr 23, 2002
Projection exposure apparatus
NIKON CORP39 citations96
US6281967B1Aug 28, 2001
Illumination apparatus, exposure apparatus and exposure method
NIKON CORP53 citations96
US6100961AAug 8, 2000
Projection exposure apparatus and method
NIKON CORP69 citations96
US5392094AFeb 21, 1995
Illumination optical system and exposure apparatus including the same system
NIKON CORP67 citations96
US5300971AApr 5, 1994
Projection exposure apparatus
NIKON CORP79 citations96
US5867319AFeb 2, 1999
Illumination optical system, an exposure apparatus having the illumination system, and a method for manufacturing a semiconductor device
NIKON CORP64 citations94
US5986744ANov 16, 1999
Projection optical system, illumination apparatus, and exposure apparatus
NIKON CORP19 citations93
US6642994B2Nov 4, 2003
Optical exposure apparatus and photo-cleaning method
NIKON CORP19 citations92
US6549267B1Apr 15, 2003
Pulse-width extending optical systems, projection-exposure apparatus comprising same, and manufacturing methods using same
NIKON CORP46 citations92
US6127095AOct 3, 2000
Illuminating optical device and semiconductor device manufacturing method
NIKON CORP37 citations92
US5798823AAug 25, 1998
Illumination optical apparatus and projection exposure apparatus using it
NIKON CORP22 citations92
US5798824AAug 25, 1998
Exposure apparatus correcting illuminance distribution
NIKON CORP23 citations92
US5745294AApr 28, 1998
Illuminating optical apparatus
NIKON CORP28 citations92
US5659429AAug 19, 1997
Illuminating optical apparatus and method
NIKON CORP31 citations92
US8705034B2Apr 22, 2014
Evaluation device and evaluation method
NIKON CORP8 citations84
US5610763AMar 11, 1997
Illuminating optical apparatus
NIKON CORP16 citations82
US6864959B2Mar 8, 2005
Projection exposure apparatus
NIKON CORP8 citations74
US5619376AApr 8, 1997
Illuminating optical apparatus for uniformly illuminating a reticle
NIKON CORP9 citations74
US7710653B2May 4, 2010
Projection optical system, exposure system, and exposure method
NIKON CORP4 citations62
US7907268B2Mar 15, 2011
Surface inspection method and surface inspection device
NIKON CORP4 citations61
US7978310B2Jul 12, 2011
Projection optical system, exposure system, and exposure method
NIKON CORP0 citations52
US7706074B2Apr 27, 2010
Projection optical system, method of manufacturing projection optical system, exposure apparatus, and exposure method
NIKON CORP0 citations42
NISSAN MOTOR
3 patentsUS6776132B2Aug 17, 2004
Intake arrangement for multi-cylinder engine
NISSAN MOTOR25 citations93
US6267091B1Jul 31, 2001
Rotary valve assembly and engine induction system using the rotary valve assembly
NISSAN MOTOR9 citations70
US6848409B2Feb 1, 2005
Intake system for an internal combustion engine
NISSAN MOTOR1 citations52
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD
2 patentsMITUTOYO CORP
2 patentsUS10274313B2Apr 30, 2019
Measurement method and measurement program for calculating roughness of a curved surface
MITUTOYO CORP2 citations70
US10859376B2Dec 8, 2020
Information processing apparatus, information processing method, and non-transitory computer readable recording medium
MITUTOYO CORP0 citations42