P

Inventor

KUDO YUJI

JP37 patents
⚠️ This page may combine multiple inventors who share the name “KUDO YUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

29 patents
US5719704AFeb 17, 1998

Projection exposure apparatus

NIKON CORP111 citations99
US5253110AOct 12, 1993

Illumination optical arrangement

NIKON CORP172 citations99
US4918583AApr 17, 1990

Illuminating optical device

NIKON CORP192 citations99
US6268904B1Jul 31, 2001

Optical exposure apparatus and photo-cleaning method

NIKON CORP146 citations98
US5237367AAug 17, 1993

Illuminating optical system and exposure apparatus utilizing the same

NIKON CORP142 citations98
US6741394B1May 25, 2004

Optical integrator, illumination optical apparatus, exposure apparatus and observation apparatus

NIKON CORP63 citations96
US6392740B1May 21, 2002

Projection exposure apparatus

NIKON CORP55 citations96
US6377336B1Apr 23, 2002

Projection exposure apparatus

NIKON CORP39 citations96
US6281967B1Aug 28, 2001

Illumination apparatus, exposure apparatus and exposure method

NIKON CORP53 citations96
US6100961AAug 8, 2000

Projection exposure apparatus and method

NIKON CORP69 citations96
US5392094AFeb 21, 1995

Illumination optical system and exposure apparatus including the same system

NIKON CORP67 citations96
US5300971AApr 5, 1994

Projection exposure apparatus

NIKON CORP79 citations96
US5867319AFeb 2, 1999

Illumination optical system, an exposure apparatus having the illumination system, and a method for manufacturing a semiconductor device

NIKON CORP64 citations94
US5986744ANov 16, 1999

Projection optical system, illumination apparatus, and exposure apparatus

NIKON CORP19 citations93
US6642994B2Nov 4, 2003

Optical exposure apparatus and photo-cleaning method

NIKON CORP19 citations92
US6549267B1Apr 15, 2003

Pulse-width extending optical systems, projection-exposure apparatus comprising same, and manufacturing methods using same

NIKON CORP46 citations92
US6127095AOct 3, 2000

Illuminating optical device and semiconductor device manufacturing method

NIKON CORP37 citations92
US5798823AAug 25, 1998

Illumination optical apparatus and projection exposure apparatus using it

NIKON CORP22 citations92
US5798824AAug 25, 1998

Exposure apparatus correcting illuminance distribution

NIKON CORP23 citations92
US5745294AApr 28, 1998

Illuminating optical apparatus

NIKON CORP28 citations92
US5659429AAug 19, 1997

Illuminating optical apparatus and method

NIKON CORP31 citations92
US8705034B2Apr 22, 2014

Evaluation device and evaluation method

NIKON CORP8 citations84
US5610763AMar 11, 1997

Illuminating optical apparatus

NIKON CORP16 citations82
US6864959B2Mar 8, 2005

Projection exposure apparatus

NIKON CORP8 citations74
US5619376AApr 8, 1997

Illuminating optical apparatus for uniformly illuminating a reticle

NIKON CORP9 citations74
US7710653B2May 4, 2010

Projection optical system, exposure system, and exposure method

NIKON CORP4 citations62
US7907268B2Mar 15, 2011

Surface inspection method and surface inspection device

NIKON CORP4 citations61
US7978310B2Jul 12, 2011

Projection optical system, exposure system, and exposure method

NIKON CORP0 citations52
US7706074B2Apr 27, 2010

Projection optical system, method of manufacturing projection optical system, exposure apparatus, and exposure method

NIKON CORP0 citations42

NISSAN MOTOR

3 patents

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

2 patents

MITUTOYO CORP

2 patents

FUKAZAWA KAZUHIKO

1 patent