Inventor
AKAMATSU TAKAHIRO
JP8 patents
Patents
8 patentsUS4887904ADec 19, 1989
Device for positioning a semi-conductor wafer
CANON KK136 citations97
US5162642ANov 10, 1992
Device for detecting the position of a surface
CANON KK75 citations95
US4853880AAug 1, 1989
Device for positioning a semi-conductor wafer
CANON KK37 citations92
US7256868B2Aug 14, 2007
Projection exposure apparatus, device manufacturing method, and sensor unit
CANON KK31 citations91
US5258823ANov 2, 1993
Alignment system
CANON KK52 citations91
US7522264B2Apr 21, 2009
Projection exposure apparatus, device manufacturing method, and sensor unit
CANON KK12 citations82
US7027079B2Apr 11, 2006
Exposure apparatus including a read circuit for reading electrical signals from a plurality of photoelectric converters
CANON KK4 citations61
US7154524B2Dec 26, 2006
Exposure apparatus including a controller configured to read electrical signals from an array of photoelectric converters
CANON KK0 citations50