Inventor
CAMPBELL GREGOR A
US5 patents
⚠️ This page may combine multiple inventors who share the name “CAMPBELL GREGOR A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PLASMA & MATERIALS TECH
3 patentsUS5429070AJul 4, 1995
High density plasma deposition and etching apparatus
PLASMA & MATERIALS TECH277 citations96
US5421891AJun 6, 1995
High density plasma deposition and etching apparatus
PLASMA & MATERIALS TECH130 citations95
US5122251AJun 16, 1992
High density plasma deposition and etching apparatus
PLASMA & MATERIALS TECH281 citations94