P

Inventor

CONN ROBERT W

US7 patents
⚠️ This page may combine multiple inventors who share the name “CONN ROBERT W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PLASMA & MATERIALS TECH

5 patents
US5429070AJul 4, 1995

High density plasma deposition and etching apparatus

PLASMA & MATERIALS TECH277 citations96
US5091049AFeb 25, 1992

High density plasma deposition and etching apparatus

PLASMA & MATERIALS TECH150 citations96
US4990229AFeb 5, 1991

High density plasma deposition and etching apparatus

PLASMA & MATERIALS TECH363 citations96
US5421891AJun 6, 1995

High density plasma deposition and etching apparatus

PLASMA & MATERIALS TECH130 citations95
US5122251AJun 16, 1992

High density plasma deposition and etching apparatus

PLASMA & MATERIALS TECH281 citations94

LEYBOLD AG

2 patents
US5656141AAug 12, 1997

Apparatus for coating substrates

LEYBOLD AG87 citations93
US4885070ADec 5, 1989

Method and apparatus for the application of materials

LEYBOLD AG56 citations93