Inventor
KONECNI ANTHONY J
US7 patents
Patents
7 patentsUS5981382ANov 9, 1999
PVD deposition process for CVD aluminum liner processing
TEXAS INSTRUMENTS INC39 citations92
US5849367ADec 15, 1998
Elemental titanium-free liner and fabrication process for inter-metal connections
TEXAS INSTRUMENTS INC22 citations92
US6069072AMay 30, 2000
CVD tin barrier layer for reduced electromigration of aluminum plugs
TEXAS INSTRUMENTS INC29 citations90
US6455419B1Sep 24, 2002
System and method of forming a tungsten plug
TEXAS INSTRUMENTS INC30 citations88
US6215186B1Apr 10, 2001
System and method of forming a tungstein plug
TEXAS INSTRUMENTS INC40 citations88
US6660650B1Dec 9, 2003
Selective aluminum plug formation and etchback process
TEXAS INSTRUMENTS INC15 citations84
US6291347B1Sep 18, 2001
Method and system for constructing semiconductor devices
TEXAS INSTRUMENTS INC2 citations61