Inventor
OSHIMA HISASHI
JP4 patents
Patents
4 patentsUS6491836B1Dec 10, 2002
Semiconductor wafer and production method therefor
SHINETSU HANDOTAI KK52 citations94
US6284658B1Sep 4, 2001
Manufacturing process for semiconductor wafer
SHINETSU HANDOTAI KK20 citations91
US6358117B1Mar 19, 2002
Processing method for a wafer
SHINETSU HANDOTAI KK9 citations72
US6220928B1Apr 24, 2001
Surface grinding method and apparatus for thin plate work
SHINETSU HANDOTAI KK14 citations72