Inventor

VAN DER AA NICOLAAS PETRUS

NL2 patents

Patents

2 patents

US7288779B2Oct 30, 2007

Method for position determination, method for overlay optimization, and lithographic projection apparatus

ASML NETHERLANDS BV4 citations54

US7649636B2Jan 19, 2010

Optical metrology system and metrology mark characterization device

ASML NETHERLANDS BV0 citations28