Inventor

OLDHAM WILLIAM

US5 patents

⚠️ This page may combine multiple inventors who share the name “OLDHAM WILLIAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FOMENKOV IGOR V

1 patent

US9029813B2May 12, 2015

Filter for material supply apparatus of an extreme ultraviolet light source

FOMENKOV IGOR V13 citations82

PARTLO WILLIAM N

1 patent

US8075732B2Dec 13, 2011

EUV collector debris management

PARTLO WILLIAM N11 citations82

UNISYS CORP

1 patent

US7650443B1Jan 19, 2010

Methods and apparatus for allocating access to a host device buffer

UNISYS CORP10 citations81

CYMER INC

1 patent

US7141806B1Nov 28, 2006

EUV light source collector erosion mitigation

CYMER INC5 citations62

ASML NETHERLANDS BV

1 patent

US9669334B2Jun 6, 2017

Material supply apparatus for extreme ultraviolet light source having a filter constructed with a plurality of openings fluidly coupled to a plurality of through holes to remove non-target particles from the supply material

ASML NETHERLANDS BV0 citations46