Inventor

PENG CHI-KANG

TW3 patents

⚠️ This page may combine multiple inventors who share the name “PENG CHI-KANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTORS MANFUACT

1 patent

US5702624ADec 30, 1997

Compete hot plate temperature control system for hot treatment

TAIWAN SEMICONDUCTORS MANFUACT36 citations82

CHEN LI-JUI

1 patent

US8264662B2Sep 11, 2012

In-line particle detection for immersion lithography

CHEN LI-JUI17 citations81

HSIEH CHUN-JEN

1 patent

US8091504B2Jan 10, 2012

Method and apparatus for cleaning spin coater

HSIEH CHUN-JEN16 citations70