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Inventor
CHEUNG DAVID WINGTO
US
2 patents
⚠️ This page may combine multiple inventors who share the name “CHEUNG DAVID WINGTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
1 patent
US11062897B2
Jul 13, 2021
Metal doped carbon based hard mask removal in semiconductor fabrication
LAM RES CORP
4 citations
67
QIU HUATAN
1 patent
US8273259B1
Sep 25, 2012
Ashing method
QIU HUATAN
1 citations
45