Inventor
JAYARAMAN THIRUPURASUNDARI
IN6 patents
Patents
6 patentsUS9865512B2Jan 9, 2018
Dynamic design attributes for wafer inspection
KLA TENCOR CORP10 citations80
US9996942B2Jun 12, 2018
Sub-pixel alignment of inspection to design
KLA TENCOR CORP3 citations69
US10209628B2Feb 19, 2019
System and method for defect classification based on electrical design intent
KLA TENCOR CORP1 citations58
US10204416B2Feb 12, 2019
Automatic deskew using design files or inspection images
KLA TENCOR CORP1 citations54
US10620134B2Apr 14, 2020
Creating defect samples for array regions
KLA TENCOR CORP0 citations35
US10387601B2Aug 20, 2019
Methods to store dynamic layer content inside a design file
KLA TENCOR CORP0 citations33