Inventor
MIZUTANI TOMOYA
JP7 patents
⚠️ This page may combine multiple inventors who share the name “MIZUTANI TOMOYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SINFONIA TECHNOLOGY CO LTD
4 patentsUS11658047B2May 23, 2023
Exhaust nozzle unit, load port, and EFEM
SINFONIA TECHNOLOGY CO LTD0 citations50
US11662373B2May 30, 2023
Substrate storage container management system, load port, and substrate storage container management method
SINFONIA TECHNOLOGY CO LTD0 citations43
US11348814B2May 31, 2022
Transfer abnormality detection system and transfer abnormality detection method
SINFONIA TECHNOLOGY CO LTD0 citations43
US10978325B2Apr 13, 2021
Substrate storage container management system, load port, and substrate storage container management method
SINFONIA TECHNOLOGY CO LTD0 citations43