Inventor
NAKATSU HIROKI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “NAKATSU HIROKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JSR CORP
5 patentsUS11243468B2Feb 8, 2022
Composition for resist underlayer film formation, resist underlayer film and formation method thereof, and patterned substrate production method
JSR CORP1 citations56
US11880138B2Jan 23, 2024
Composition, pattern-forming method, and compound-producing method
JSR CORP0 citations50
US11667620B2Jun 6, 2023
Composition, film, film-forming method and patterned substrate-producing method
JSR CORP0 citations50
US11454890B2Sep 27, 2022
Composition for resist underlayer film formation, resist underlayer film and forming method thereof, patterned substrate-producing method, and compound
JSR CORP0 citations49
US11215928B2Jan 4, 2022
Composition for resist underlayer film formation, resist underlayer film and method for forming the same, and production method of a patterned substrate
JSR CORP0 citations48