Inventor
MIURA ICHIHIRO
JP3 patents
⚠️ This page may combine multiple inventors who share the name “MIURA ICHIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JSR CORP
2 patentsUS11243468B2Feb 8, 2022
Composition for resist underlayer film formation, resist underlayer film and formation method thereof, and patterned substrate production method
JSR CORP1 citations56
US11215928B2Jan 4, 2022
Composition for resist underlayer film formation, resist underlayer film and method for forming the same, and production method of a patterned substrate
JSR CORP0 citations48