Inventor
MARMILLION PATRICIA E
US5 patents
Patents
5 patentsUS5896870AApr 27, 1999
Method of removing slurry particles
IBM55 citations95
US6171436B1Jan 9, 2001
Apparatus for removing slurry particles
IBM16 citations91
US5785584AJul 28, 1998
Planarizing apparatus with deflectable polishing pad
IBM24 citations91
US6294453B1Sep 25, 2001
Micro fusible link for semiconductor devices and method of manufacture
IBM14 citations72
US5934977AAug 10, 1999
Method of planarizing a workpiece
IBM12 citations72