Inventor

LU JEAN

US2 patents

⚠️ This page may combine multiple inventors who share the name “LU JEAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

1 patent

US6342133B2Jan 29, 2002

PVD deposition of titanium and titanium nitride layers in the same chamber without use of a collimator or a shutter

NOVELLUS SYSTEMS INC92 citations91

APPLIED MATERIALS INC

1 patent

US11802349B2Oct 31, 2023

Method for depositing high quality PVD films

APPLIED MATERIALS INC0 citations60