Inventor

CANTELOUP JEAN

FR9 patents

⚠️ This page may combine multiple inventors who share the name “CANTELOUP JEAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

3 patents

US5658418AAug 19, 1997

Apparatus for monitoring the dry etching of a dielectric film to a given thickness in an integrated circuit

IBM160 citations98

US6363294B1Mar 26, 2002

Method and system for semiconductor wafer fabrication process real-time in-situ interactive supervision

IBM491 citations96

US5807761ASep 15, 1998

Method for real-time in-situ monitoring of a trench formation process

IBM80 citations96

SOFIE

2 patents

US5648849AJul 15, 1997

Method of and device for in situ real time quantification of the morphology and thickness of a localized area of a surface layer of a thin layer structure during treatment of the latter

SOFIE81 citations91

US5355217AOct 11, 1994

Assembly for simultaneous observation and laser interferometric measurements, in particular on thin-film structures

SOFIE16 citations68

INSTRUMENTS SA

1 patent

US5898500AApr 27, 1999

Device and method for three-dimensional measurements and observation in situ of a surface layer deposited on a thin-film stack

INSTRUMENTS SA38 citations86

SOFIE INSTR

1 patent

US5748296AMay 5, 1998

Method and device for in situ quantification, by reflectometry, of the morphology of a localized region during etching of the surface layer of a thin-film structure

SOFIE INSTR19 citations79

CIT ALCATEL

1 patent

US4676644AJun 30, 1987

Device for monitoring the thickness of thin layers

CIT ALCATEL12 citations73

ARMINES

1 patent

US4207834AJun 17, 1980

Process and devices for the elaboration of preforms for optical fibers

ARMINES8 citations62