Inventor
HUNG HOIMAN
US7 patents
⚠️ This page may combine multiple inventors who share the name “HUNG HOIMAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS6387287B1May 14, 2002
Process for etching oxide using a hexafluorobutadiene and manifesting a wide process window
APPLIED MATERIALS INC94 citations97
US6380096B2Apr 30, 2002
In-situ integrated oxide etch process particularly useful for copper dual damascene
APPLIED MATERIALS INC96 citations96
US6921727B2Jul 26, 2005
Method for modifying dielectric characteristics of dielectric layers
APPLIED MATERIALS INC61 citations94
US6432318B1Aug 13, 2002
Dielectric etch process reducing striations and maintaining critical dimensions
APPLIED MATERIALS INC24 citations92
US7547621B2Jun 16, 2009
LPCVD gate hard mask
APPLIED MATERIALS INC0 citations49