Inventor
CHEN BI-TRONG
TW4 patents
Patents
4 patentsUS7244673B2Jul 17, 2007
Integration film scheme for copper / low-k interconnect
TAIWAN SEMICONDUCTOR MFG12 citations82
US6623654B2Sep 23, 2003
Thin interface layer to improve copper etch stop
TAIWAN SEMICONDUCTOR MFG5 citations72
US6887790B1May 3, 2005
Method of forming dummy copper plug to improve low k structure mechanical strength and plug fill uniformity
TAIWAN SEMICONDUCTOR MFG3 citations61
US6884659B2Apr 26, 2005
Thin interface layer to improve copper etch stop
TAIWAN SEMICONDUCTOR MFG1 citations50