Inventor
CHO SEONG-DUK
KR2 patents
Patents
2 patentsUS7285373B2Oct 23, 2007
Polymer and chemically amplified resist composition containing the same
KOREA KUMHO PETROCHEM CO LTD6 citations59
US7326520B2Feb 5, 2008
Copolymer of alicyclic olefin having secondary hydroxyl group and acryl compound, and chemically amplified resist composition containing the same
KOREA KUMHO PETROCHEM CO LTD3 citations58