Inventor

TOYODA HIROTAKA

JP5 patents

⚠️ This page may combine multiple inventors who share the name “TOYODA HIROTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US9252000B2Feb 2, 2016

Microwave waveguide apparatus, plasma processing apparatus and plasma processing method

TOKYO ELECTRON LTD1 citations50

US9852892B1Dec 26, 2017

Microwave supply apparatus, plasma processing apparatus, and plasma processing method

TOKYO ELECTRON LTD0 citations40

ITOH HITOSHI

1 patent

US8610353B2Dec 17, 2013

Plasma generating apparatus, plasma processing apparatus and plasma processing method

ITOH HITOSHI7 citations82

NATIONAL UNIV CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH SYSTEM

1 patent

US11152193B2Oct 19, 2021

Plasma generation apparatus

NATIONAL UNIV CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH SYSTEM0 citations47

TOKAI RUBBER IND LTD

1 patent

US9506142B2Nov 29, 2016

High density microwave plasma generation apparatus, and magnetron sputtering deposition system using the same

TOKAI RUBBER IND LTD1 citations45