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Inventor
KAO MAO-LIN
TW
6 patents
⚠️ This page may combine multiple inventors who share the name “KAO MAO-LIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
2 patents
US9852932B2
Dec 26, 2017
Method for processing semiconductor wafer
TAIWAN SEMICONDUCTOR MFG CO LTD
0 citations
50
US9921493B2
Mar 20, 2018
Photolithography system, method for transporting photo-mask and unit therein
TAIWAN SEMICONDUCTOR MFG CO LTD
1 citations
49
TUNG CHI-FENG
1 patent
US9305815B2
Apr 5, 2016
Automated material handling system and method for semiconductor manufacturing
TUNG CHI-FENG
5 citations
66
WANG WEI-CHENG
1 patent
US9048274B2
Jun 2, 2015
Portable stocker and method of using same
WANG WEI-CHENG
1 citations
49
TAIWAN SEMICONDUCTOR MFG
1 patent
US9281221B2
Mar 8, 2016
Ultra-high vacuum (UHV) wafer processing
TAIWAN SEMICONDUCTOR MFG
1 citations
47
KAO MAO-LIN
1 patent
US9558974B2
Jan 31, 2017
Semiconductor processing station and method for processing semiconductor wafer
KAO MAO-LIN
1 citations
44