Inventor
BRENG UWE
DE7 patents
⚠️ This page may combine multiple inventors who share the name “BRENG UWE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LITEF GMBH
5 patentsUS7964428B2Jun 21, 2011
Micromechanical component and method for fabricating a micromechanical component
LITEF GMBH21 citations91
US5959206ASep 28, 1999
Micromechanical rotation speed sensor
LITEF GMBH41 citations89
US6863832B1Mar 8, 2005
Method for producing a torsion spring
LITEF GMBH29 citations87
US6490923B1Dec 10, 2002
Micromechanical rpm sensor
LITEF GMBH18 citations82
US6119517ASep 19, 2000
Micro-mechanical rate-of-rotation sensor with coupled structure
LITEF GMBH14 citations71