Inventor

NAGAI EITARO

JP3 patents

Patents

3 patents

US5225373AJul 6, 1993

Method of manufacturing semiconductor pressure sensor device with two semiconductor pressure sensor chips

MITSUBISHI ELECTRIC CORP35 citations91

US5126813AJun 30, 1992

Semiconductor pressure sensor device with two semiconductor pressure sensor chips and a method of manufacturing thereof

MITSUBISHI ELECTRIC CORP25 citations91

US5530270AJun 25, 1996

Substrate for semiconductr device

MITSUBISHI ELECTRIC CORP13 citations71