Inventor
CONRAD EDWARD W
US32 patents
⚠️ This page may combine multiple inventors who share the name “CONRAD EDWARD W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
30 patentsUS6016357AJan 18, 2000
Feedback method to repair phase shift masks
IBM201 citations99
US6425112B1Jul 23, 2002
Auto correction of error checked simulated printed images
IBM235 citations98
US6373975B1Apr 16, 2002
Error checking of simulated printed images with process window effects included
IBM87 citations97
US5963329AOct 5, 1999
Method and apparatus for measuring the profile of small repeating lines
IBM554 citations96
US7627622B2Dec 1, 2009
System and method of curve fitting
IBM80 citations94
US5980647ANov 9, 1999
Metal removal cleaning process and apparatus
IBM74 citations93
US7257247B2Aug 14, 2007
Mask defect analysis system
IBM13 citations92
US6735492B2May 11, 2004
Feedback method utilizing lithographic exposure field dimensions to predict process tool overlay settings
IBM61 citations92
US6704695B1Mar 9, 2004
Interactive optical proximity correction design method
IBM24 citations92
US6539321B2Mar 25, 2003
Method for edge bias correction of topography-induced linewidth variation
IBM22 citations92
US6395438B1May 28, 2002
Method of etch bias proximity correction
IBM33 citations92
US6383719B1May 7, 2002
Process for enhanced lithographic imaging
IBM32 citations92
US6261724B1Jul 17, 2001
Method of modifying a microchip layout data set to generate a predicted mask printed data set
IBM20 citations92
US6922600B1Jul 26, 2005
System and method for optimizing manufacturing processes using real time partitioned process capability analysis
IBM31 citations91
US6528219B1Mar 4, 2003
Dynamic alignment scheme for a photolithography system
IBM33 citations91
US6268908B1Jul 31, 2001
Micro adjustable illumination aperture
IBM22 citations91
US5325180AJun 28, 1994
Apparatus for identifying and distinguishing temperature and system induced measuring errors
IBM31 citations90
US6965808B1Nov 15, 2005
System and method for optimizing metrology sampling in APC applications
IBM12 citations83
US6694498B2Feb 17, 2004
Feed-forward lithographic overlay offset method and system
IBM15 citations82
US6879719B1Apr 12, 2005
Method for measurement of full-two dimensional submicron shapes
IBM15 citations81
US6949458B2Sep 27, 2005
Self-aligned contact areas for sidewall image transfer formed conductors
IBM7 citations73
US6566759B1May 20, 2003
Self-aligned contact areas for sidewall image transfer formed conductors
IBM12 citations73
US7492940B2Feb 17, 2009
Mask defect analysis system
IBM2 citations62
US7492941B2Feb 17, 2009
Mask defect analysis system
IBM3 citations62
US6667136B2Dec 23, 2003
Method to control nested to isolated line printing
IBM5 citations62
US6458493B2Oct 1, 2002
Method to control nested to isolated line printing
IBM4 citations62
US6429469B1Aug 6, 2002
Optical Proximity Correction Structures Having Decoupling Capacitors
IBM5 citations62
US6387596B2May 14, 2002
Method of forming resist images by periodic pattern removal
IBM5 citations62
US6258490B1Jul 10, 2001
Transmission control mask utilized to reduce foreshortening effects
IBM6 citations62
US7171319B2Jan 30, 2007
Method and apparatus to separate field and grid parameters on first level wafers
IBM0 citations51