Inventor

KAMADA MASATO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “KAMADA MASATO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

2 patents

US6828573B1Dec 7, 2004

Electron beam lithography system

HITACHI LTD24 citations89

US6674086B2Jan 6, 2004

Electron beam lithography system, electron beam lithography apparatus, and method of lithography

HITACHI LTD28 citations89

AGC ENGINEERING CO LTD

1 patent

US8377179B2Feb 19, 2013

Moisture control module, process for producing the moisture control module, and apparatus for producing the moisture control module

AGC ENGINEERING CO LTD0 citations40