Inventor
ISHIHARA TOSHIHIKO
US21 patents
⚠️ This page may combine multiple inventors who share the name “ISHIHARA TOSHIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
16 patentsUS5982800ANov 9, 1999
Narrow band excimer laser
CYMER INC122 citations99
US6690704B2Feb 10, 2004
Control system for a two chamber gas discharge laser
CYMER INC128 citations98
US6018537AJan 25, 2000
Reliable, modular, production quality narrow-band high rep rate F2 laser
CYMER INC280 citations98
US6014398AJan 11, 2000
Narrow band excimer laser with gas additive
CYMER INC106 citations98
US6330261B1Dec 11, 2001
Reliable, modular, production quality narrow-band high rep rate ArF excimer laser
CYMER INC105 citations97
US6188710B1Feb 13, 2001
Narrow band gas discharge laser with gas additive
CYMER INC82 citations96
US6034978AMar 7, 2000
Gas discharge laser with gas temperature control
CYMER INC70 citations95
US7079564B2Jul 18, 2006
Control system for a two chamber gas discharge laser
CYMER INC26 citations92
US7039086B2May 2, 2006
Control system for a two chamber gas discharge laser
CYMER INC32 citations92
USRE38054EApr 1, 2003
Reliable, modular, production quality narrow-band high rep rate F2 laser
CYMER INC42 citations92
US7741639B2Jun 22, 2010
Multi-chambered excimer or molecular fluorine gas discharge laser fluorine injection control
CYMER INC12 citations82
US6963595B2Nov 8, 2005
Automatic gas control system for a gas discharge laser
CYMER INC20 citations81
US7894494B2Feb 22, 2011
Method and apparatus to control output spectrum bandwidth of MOPO or MOPA laser
CYMER INC5 citations74
US6014397AJan 11, 2000
Laser chamber incorporating ceramic insulators coated with dielectric material
CYMER INC3 citations63
USRE42588EAug 2, 2011
Control system for a two chamber gas discharge laser system
CYMER INC5 citations62
US7596164B2Sep 29, 2009
Control system for a two chamber gas discharge laser
CYMER INC5 citations62