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Inventor
FEN JAMIN F
US
2 patents
⚠️ This page may combine multiple inventors who share the name “FEN JAMIN F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LIM KHEE YONG
1 patent
US8148221B2
Apr 3, 2012
Double anneal with improved reliability for dual contact etch stop liner scheme
LIM KHEE YONG
3 citations
55
CHARTERED SEMICONDUCTOR MFG
1 patent
US7615433B2
Nov 10, 2009
Double anneal with improved reliability for dual contact etch stop liner scheme
CHARTERED SEMICONDUCTOR MFG
1 citations
50