Inventor
MANAKLI SERDAR
FR9 patents
⚠️ This page may combine multiple inventors who share the name “MANAKLI SERDAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MANAKLI SERDAR
4 patentsUS9607808B2Mar 28, 2017
Method of electron-beam lithography with correction of corner roundings
MANAKLI SERDAR2 citations68
US8713499B2Apr 29, 2014
Electron-beam lithography method with correction of line ends by insertion of contrast patterns
MANAKLI SERDAR4 citations68
US9250540B2Feb 2, 2016
Lithography method with combined optimization of radiated energy and design geometry
MANAKLI SERDAR0 citations47
US9235132B2Jan 12, 2016
Large-mesh cell-projection electron-beam lithography method
MANAKLI SERDAR0 citations47