Inventor

YOKOTA AKIHIRO

JP25 patents

⚠️ This page may combine multiple inventors who share the name “YOKOTA AKIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YOKOTA AKIHIRO

TOKYO ELECTRON LTD

Substrate processing method

Substrate processing apparatus

Plasma processing method

Plasma etching method

Plasma processing apparatus

Plasma processing apparatus and temperature control method

Plasma processing system and method of processing substrate

Substrate processing method and substrate processing apparatus

Plasma processing method

Plasma processing apparatus

Plasma processing apparatus and plasma processing method

Etching method of multilayer film

Plasma processing apparatus

SEKINOS CO LTD

Prism assembly and method for producing the same

Projection lens

Projection lens unit

NTI INC

Data transfer method, data transfer apparatus, data transmission device, and data reception device

Information providing method, information processing device, information collection system, communication method, communication system, relay device, and communication device

Calculation apparatus

DAINIPPON SCREEN MFG

Multi-beam zoom and focusing lens scan pitch-adjusting recorder

Method of and apparatus for recording image in the form of pixel array

Visual monitoring device which projects an image of a register mark onto a scanning surface for use in setting image processing conditions

CANON KK

Animation display apparatus, arcade game machine, control method and apparatus thereof, and storage medium

DAIKIN IND LTD

Heating system

IIZUKA HACHISHIRO

Plasma processing apparatus and shower head