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Inventor

FREISCHLAD KLAUS

US13 patents
⚠️ This page may combine multiple inventors who share the name “FREISCHLAD KLAUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS STIFTUNG

4 patents
US5357341AOct 18, 1994

Method for evaluating interferograms and interferometer therefor

ZEISS STIFTUNG29 citations92
US5185810AFeb 9, 1993

Method for optical testing of samples

ZEISS STIFTUNG23 citations92
US5311599AMay 10, 1994

Method and apparatus for optical testing of samples

ZEISS STIFTUNG10 citations73
US5042041AAug 20, 1991

Radiation source for partially coherent radiation

ZEISS STIFTUNG1 citations51

PHASE SHIFT TECHNOLOGY

2 patents
US6061133AMay 9, 2000

Interferometer light source

PHASE SHIFT TECHNOLOGY39 citations90
US6844929B2Jan 18, 2005

Apparatus and method for holding and transporting thin opaque plates

PHASE SHIFT TECHNOLOGY9 citations63

KLA TENCOR TECH CORP

2 patents
US7408649B2Aug 5, 2008

Method and apparatus for optically analyzing a surface

KLA TENCOR TECH CORP11 citations83
US7428056B2Sep 23, 2008

Method and apparatus for optically analyzing a surface

KLA TENCOR TECH CORP6 citations73

PHASE SHIFT TECHNOLOGY INC

1 patent
US6847458B2Jan 25, 2005

Method and apparatus for measuring the shape and thickness variation of polished opaque plates

PHASE SHIFT TECHNOLOGY INC81 citations96

ZEISS CARL SMT AG

1 patent
US7333216B2Feb 19, 2008

Apparatus for wavefront detection

ZEISS CARL SMT AG46 citations92

ADE PHASE SHIFT TECHNOLOGY

1 patent
US6184994B1Feb 6, 2001

Method and apparatus for absolutely measuring flat and sperical surfaces with high spatal resolution

ADE PHASE SHIFT TECHNOLOGY53 citations89

KLA TENCOR CORP

1 patent
US7583386B2Sep 1, 2009

Method and apparatus for optically analyzing a surface

KLA TENCOR CORP5 citations73

FREISCHLAD KLAUS

1 patent
US8797537B2Aug 5, 2014

Interferometer with a virtual reference surface

FREISCHLAD KLAUS2 citations56