P

Inventor

VERHAVERBEKE STEVEN

US137 patents
⚠️ This page may combine multiple inventors who share the name “VERHAVERBEKE STEVEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

38 patents
US7159599B2Jan 9, 2007

Method and apparatus for processing a wafer

APPLIED MATERIALS INC96 citations97
US6927176B2Aug 9, 2005

Cleaning method and solution for cleaning a wafer in a single wafer process

APPLIED MATERIALS INC67 citations97
US7000621B1Feb 21, 2006

Methods and apparatuses for drying wafer

APPLIED MATERIALS INC57 citations96
US6843855B2Jan 18, 2005

Methods for drying wafer

APPLIED MATERIALS INC44 citations96
US11018032B2May 25, 2021

High pressure and high temperature anneal chamber

APPLIED MATERIALS INC15 citations94
US10636677B2Apr 28, 2020

High pressure and high temperature anneal chamber

APPLIED MATERIALS INC17 citations94
US10276411B2Apr 30, 2019

High pressure and high temperature anneal chamber

APPLIED MATERIALS INC25 citations94
US10229827B2Mar 12, 2019

Method of redistribution layer formation for advanced packaging applications

APPLIED MATERIALS INC33 citations94
US10096516B1Oct 9, 2018

Method of forming a barrier layer for through via applications

APPLIED MATERIALS INC25 citations94
US11264331B2Mar 1, 2022

Package structure and fabrication methods

APPLIED MATERIALS INC10 citations93
US10886232B2Jan 5, 2021

Package structure and fabrication methods

APPLIED MATERIALS INC16 citations93
US10211072B2Feb 19, 2019

Method of reconstituted substrate formation for advanced packaging applications

APPLIED MATERIALS INC37 citations93
US7235479B2Jun 26, 2007

Organic solvents having ozone dissolved therein for semiconductor processing utilizing sacrificial materials

APPLIED MATERIALS INC23 citations93
US7585686B2Sep 8, 2009

Method and apparatus for processing a wafer

APPLIED MATERIALS INC33 citations92
US7456113B2Nov 25, 2008

Cleaning method and solution for cleaning a wafer in a single wafer process

APPLIED MATERIALS INC23 citations92
US7037842B2May 2, 2006

Method and apparatus for dissolving a gas into a liquid for single wet wafer processing

APPLIED MATERIALS INC43 citations92
US7021319B2Apr 4, 2006

Assisted rinsing in a single wafer cleaning process

APPLIED MATERIALS INC23 citations92
US7334588B2Feb 26, 2008

Method and apparatus for wafer cleaning

APPLIED MATERIALS INC26 citations91
US11462417B2Oct 4, 2022

High pressure and high temperature anneal chamber

APPLIED MATERIALS INC6 citations86
US10234630B2Mar 19, 2019

Method for creating a high refractive index wave guide

APPLIED MATERIALS INC15 citations86
US11676832B2Jun 13, 2023

Laser ablation system for package fabrication

APPLIED MATERIALS INC7 citations85
US10347511B2Jul 9, 2019

Stiction-free drying process with contaminant removal for high-aspect ratio semiconductor device STR

APPLIED MATERIALS INC5 citations84
US7449127B2Nov 11, 2008

Cleaning method and solution for cleaning a wafer in a single wafer process

APPLIED MATERIALS INC10 citations84
US6524940B2Feb 25, 2003

Methods and devices utilizing the ammonium termination of silicon dioxide films

APPLIED MATERIALS INC17 citations84
US7163018B2Jan 16, 2007

Single wafer cleaning method to reduce particle defects on a wafer surface

APPLIED MATERIALS INC12 citations83
US6807972B2Oct 26, 2004

Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamber

APPLIED MATERIALS INC13 citations83
US7718009B2May 18, 2010

Cleaning submicron structures on a semiconductor wafer surface

APPLIED MATERIALS INC18 citations82
US7451774B2Nov 18, 2008

Method and apparatus for wafer cleaning

APPLIED MATERIALS INC11 citations82
US7469883B2Dec 30, 2008

Cleaning method and solution for cleaning a wafer in a single wafer process

APPLIED MATERIALS INC9 citations80
US7435686B2Oct 14, 2008

Semiconductor processing using energized hydrogen gas and in combination with wet cleaning

APPLIED MATERIALS INC8 citations74
US7432177B2Oct 7, 2008

Post-ion implant cleaning for silicon on insulator substrate preparation

APPLIED MATERIALS INC7 citations74
US7402213B2Jul 22, 2008

Stripping and removal of organic-containing materials from electronic device substrate surfaces

APPLIED MATERIALS INC8 citations74
US7011715B2Mar 14, 2006

Rotational thermophoretic drying

APPLIED MATERIALS INC7 citations74
US6954021B2Oct 11, 2005

Matching circuit for megasonic transducer device

APPLIED MATERIALS INC8 citations74
US11281094B2Mar 22, 2022

Method for via formation by micro-imprinting

APPLIED MATERIALS INC2 citations73
US11257790B2Feb 22, 2022

High connectivity device stacking

APPLIED MATERIALS INC3 citations73
US11232951B1Jan 25, 2022

Method and apparatus for laser drilling blind vias

APPLIED MATERIALS INC2 citations73
US11063169B2Jul 13, 2021

Substrate structuring methods

APPLIED MATERIALS INC2 citations73

CFMT INC

7 patents

IMEC VZW

1 patent

MATTSON TECHNOLOGY IP

1 patent

SATO TATSUYA E

1 patent

NALAMASU OMKARAM

1 patent

VERHAVERBEKE STEVEN

1 patent

Showing the top 50 of 137 patents by PatentIndex Score.