Inventor

LAI GILBERT

US2 patents

Patents

2 patents

US5856236AJan 5, 1999

Method of depositing a smooth conformal aluminum film on a refractory metal nitride layer

MICRON TECHNOLOGY INC38 citations94

US6204175B1Mar 20, 2001

Method of depositing a smooth conformal aluminum film on a refractory metal nitride layer

MICRON TECHNOLOGY INC7 citations72