Inventor
MELAKU YOSIAS
US3 patents
Patents
3 patentsUS6316169B1Nov 13, 2001
Methods for reducing profile variation in photoresist trimming
LAM RES CORP51 citations94
US6432832B1Aug 13, 2002
Method of improving the profile angle between narrow and wide features
LAM RES CORP35 citations89
US6653058B2Nov 25, 2003
Methods for reducing profile variation in photoresist trimming
LAM RES CORP5 citations71