Inventor
MEDER GERALD S
US3 patents
Patents
3 patentsUS6296716B1Oct 2, 2001
Process for cleaning ceramic articles
SAINT GOBAIN CERAMICS84 citations95
US6565667B2May 20, 2003
Process for cleaning ceramic articles
SAINT GOBAIN CERAMICS41 citations94
US6723437B2Apr 20, 2004
Semiconductor processing component having low surface contaminant concentration
SAINT GOBAIN CERAMICS15 citations90