Inventor
KANG YOUNG-SEOG
KR6 patents
⚠️ This page may combine multiple inventors who share the name “KANG YOUNG-SEOG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
5 patentsUS7900170B2Mar 1, 2011
System and method correcting optical proximity effect using pattern configuration dependent OPC models
SAMSUNG ELECTRONICS CO LTD7 citations82
US7361433B2Apr 22, 2008
Photomask for forming photoresist patterns repeating in two dimensions and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD9 citations82
US7475383B2Jan 6, 2009
Method of fabricating photo mask
SAMSUNG ELECTRONICS CO LTD16 citations81
US6911286B2Jun 28, 2005
Method of designing phase grating pattern providing modified illumination optimum for producing a target pattern and method of manufacturing a photo mask system comprising the phase grating pattern
SAMSUNG ELECTRONICS CO LTD7 citations71
US7139064B2Nov 21, 2006
Optical system for providing a hexapole illumination and method of forming a photoresist pattern on a substrate using the same
SAMSUNG ELECTRONICS CO LTD2 citations61