Inventor

KUGAYA TAKASHI

JP4 patents

Patents

4 patents

US4362060ADec 7, 1982

Displacement transducer

HITACHI LTD33 citations89

US6336842B1Jan 8, 2002

Rotary machining apparatus

HITACHI LTD30 citations86

US7166013B2Jan 23, 2007

Polishing apparatus and method for producing semiconductors using the apparatus

HITACHI LTD1 citations48

US7137866B2Nov 21, 2006

Polishing apparatus and method for producing semiconductors using the apparatus

HITACHI LTD0 citations38