Inventor
OOTSUKI SHIGEO
JP4 patents
⚠️ This page may combine multiple inventors who share the name “OOTSUKI SHIGEO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
3 patentsUS6336842B1Jan 8, 2002
Rotary machining apparatus
HITACHI LTD30 citations86
US7166013B2Jan 23, 2007
Polishing apparatus and method for producing semiconductors using the apparatus
HITACHI LTD1 citations48
US7137866B2Nov 21, 2006
Polishing apparatus and method for producing semiconductors using the apparatus
HITACHI LTD0 citations38