Inventor

KAWAI RYOSEI

JP2 patents

Patents

2 patents

US7166013B2Jan 23, 2007

Polishing apparatus and method for producing semiconductors using the apparatus

HITACHI LTD1 citations48

US7137866B2Nov 21, 2006

Polishing apparatus and method for producing semiconductors using the apparatus

HITACHI LTD0 citations38