Inventor
UEMAE SHOJI
JP3 patents
Patents
3 patentsUS9555436B2Jan 31, 2017
Substrate treating apparatus and substrate treatment method for discharging treatment solution from nozzle to substrate
SCREEN HOLDINGS CO LTD9 citations73
US10096493B2Oct 9, 2018
Substrate treatment apparatus, and substrate treatment method
SCREEN HOLDINGS CO LTD1 citations45
US9601358B2Mar 21, 2017
Substrate treatment apparatus, and substrate treatment method
SCREEN HOLDINGS CO LTD1 citations45