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Inventor
NAKADA SHIGEO
JP
4 patents
⚠️ This page may combine multiple inventors who share the name “NAKADA SHIGEO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JSP CORP
1 patent
US5085814A
Feb 4, 1992
Production process of expansion-molded article
JSP CORP
27 citations
90
MORITA SHINYA
1 patent
US8851886B2
Oct 7, 2014
Substrate processing apparatus and method of manufacturing semiconductor device
MORITA SHINYA
11 citations
83
NAKADA SHIGEO
1 patent
US9460945B2
Oct 4, 2016
Substrate processing apparatus for semiconductor devices
NAKADA SHIGEO
2 citations
54
HITACHI INT ELECTRIC INC
1 patent
US9628689B2
Apr 18, 2017
Image pickup element unit and image pickup apparatus with heat generating member
HITACHI INT ELECTRIC INC
0 citations
40