Inventor
KAMIKANNA Kazukiyo
JP4 patents
Patents
4 patentsUS10028366B2Jul 17, 2018
Extreme UV light generation device and target recovery apparatus
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US9961755B2May 1, 2018
Extreme ultraviolet light generation device
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US10582600B2Mar 3, 2020
Droplet collection device
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US10524342B2Dec 31, 2019
Droplet collection device
GIGAPHOTON INC0 citations45