Inventor
DESAI ANIL A
US3 patents
Patents
3 patentsUS5578821ANov 26, 1996
Electron beam inspection system and method
KLA INSTR CORP421 citations95
US4647764AMar 3, 1987
Rotational and focusing apparatus for turret mounted lenses
KLA INSTR CORP26 citations90
US4604910AAug 12, 1986
Apparatus for accurately positioning an object at each of two locations
KLA INSTR CORP21 citations80