Inventor
PAI CHIEN-SHING
US17 patents
⚠️ This page may combine multiple inventors who share the name “PAI CHIEN-SHING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LUCENT TECHNOLOGIES INC
7 patentsUS5616518AApr 1, 1997
Process for fabricating integrating circuits
LUCENT TECHNOLOGIES INC188 citations98
US6149778ANov 21, 2000
Article comprising fluorinated amorphous carbon and method for fabricating article
LUCENT TECHNOLOGIES INC20 citations92
US6147407ANov 14, 2000
Article comprising fluorinated amorphous carbon and process for fabricating article
LUCENT TECHNOLOGIES INC44 citations92
US7081623B2Jul 25, 2006
Wafer-based ion traps
LUCENT TECHNOLOGIES INC17 citations84
US6967326B2Nov 22, 2005
Mass spectrometers on wafer-substrates
LUCENT TECHNOLOGIES INC13 citations84
US7452741B2Nov 18, 2008
Process for manufacturing an apparatus that protects features during the removal of sacrificial materials
LUCENT TECHNOLOGIES INC0 citations52
US7435391B2Oct 14, 2008
Light-mediated micro-chemical reactors
LUCENT TECHNOLOGIES INC1 citations52
AT & T BELL LAB
4 patentsUS5124014AJun 23, 1992
Method of forming oxide layers by bias ECR plasma deposition
AT & T BELL LAB122 citations95
US5134447AJul 28, 1992
Neutral impurities to increase lifetime of operation of semiconductor devices
AT & T BELL LAB34 citations92
US5344797ASep 6, 1994
Method of forming interlevel dielectric for integrated circuits
AT & T BELL LAB28 citations90
US5057455AOct 15, 1991
Formation of integrated circuit electrodes
AT & T BELL LAB18 citations73
AGERE SYST GUARDIAN CORP
3 patentsUS6312766B1Nov 6, 2001
Article comprising fluorinated diamond-like carbon and method for fabricating article
AGERE SYST GUARDIAN CORP14 citations74
US6350659B1Feb 26, 2002
Process of making semiconductor device having regions of insulating material formed in a semiconductor substrate
AGERE SYST GUARDIAN CORP10 citations73
US6469390B2Oct 22, 2002
Device comprising thermally stable, low dielectric constant material
AGERE SYST GUARDIAN CORP12 citations71