Inventor
TAMURA KAZUTAKA
JP7 patents
⚠️ This page may combine multiple inventors who share the name “TAMURA KAZUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TORAY INDUSTRIES
4 patentsUS6576400B1Jun 10, 2003
Positive-working radiation-sensitive composition and process for forming a pattern
TORAY INDUSTRIES15 citations82
US5629127AMay 13, 1997
Positive electron beam resist composition containing cresolnovolak resin, select additive and methyl gallate/1,2-naphthoquinonediazido-4-sulfonyl chloride reaction product
TORAY INDUSTRIES8 citations68
US6919157B2Jul 19, 2005
Positive type radiation-sensitive composition and process for producing pattern with the same
TORAY INDUSTRIES2 citations58
US5851739ADec 22, 1998
Quinonediazide/novolak positive electron beam resist developer
TORAY INDUSTRIES1 citations49