Inventor
ABRAHAM STEPHEN F
US5 patents
Patents
5 patentsUS7179151B1Feb 20, 2007
Polishing pad, a polishing apparatus, and a process for using the polishing pad
FREESCALE SEMICONDUCTOR INC25 citations90
US7534162B2May 19, 2009
Grooved platen with channels or pathway to ambient air
FREESCALE SEMICONDUCTOR INC13 citations81
US7520797B2Apr 21, 2009
Platen endpoint window with pressure relief
FREESCALE SEMICONDUCTOR INC5 citations60
US7497763B2Mar 3, 2009
Polishing pad, a polishing apparatus, and a process for using the polishing pad
FREESCALE SEMICONDUCTOR INC3 citations60
US7892070B2Feb 22, 2011
Process of using a polishing apparatus including a platen window and a polishing pad
FREESCALE SEMICONDUCTOR INC1 citations49