Inventor
YUKI HIDEAKI
JP4 patents
Patents
4 patentsUS9455197B2Sep 27, 2016
Method for manufacturing silicon carbide semiconductor device
MITSUBISHI ELECTRIC CORP2 citations60
US9188872B2Nov 17, 2015
Method for manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP0 citations46
US9159585B2Oct 13, 2015
Method of manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP0 citations36
US9063428B2Jun 23, 2015
Method for manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP0 citations35