Inventor

HAO BAOTONG

CN2 patents

Patents

2 patents

US10983448B2Apr 20, 2021

Objective lens protection device, objective lens system and lithographic device

SHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD1 citations55

US10539887B2Jan 21, 2020

Lens contamination prevention device and method

SHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD1 citations46